Teilgenommen an dem Projekt hatten Automobilhersteller wie Audi, BMW, DaimlerChrysler, Ford und Volkswagen, Flugzeugbauer wie EADS und Airbus, Gerätehersteller wie MicroVision, Physoptics oder Zeiss, und Forschungsinstitute wie die Fraunhofer Gesellschaft oder die RWTH Aachen. 37 Patente wurden während der vierjährigen Projektlaufzeit angemeldet.

The new TeraScan deep ultraviolet (DUV) reticle inspection system had been expected for weeks (see June 20 story ). The new TeraScan detects classical defects as small as 80-nm and critical-dimension (CD) defects as small as 50-nm on photomasks.

The shutdowns will likely trim millions in expenses off the two companies' respective quarterly expense sheets, as they compete for the number one spot in the EDA market.